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Piezoresistive Silicon Pressure Sensor
 
Description
It is piezoresistive silicon pressure sensor, the main element is a diffused silicon with high stability. It
utilizes silicon oil to transfer pressure from 316L stainless steel diaphragm to sensing element. The sensing
element uses 316L stainless steel to packing and thick film circuit to do temperature compensation and zero
correction. It has high reliability and stability.
 

Features
Wide measurement range:0~10KPa~100Mpa
Piezoresistive silicon sensing element
Full316LSS,Full Titanium or Hastelloy diaphragm
O-ring mount                                    
High Accuracy and stability     

 
Application
Measurement pressure of gas and liquid
Petroleum exploitation
Water supply、warm supply of town
Process control system
Aviation and navigation inspection
Hydraulic pressure


Electrical Data

Supply:1.5mADC                                 
Input impedance:3KΩ~6KΩ
Output impedance:2.5KΩ~6KΩ                    
Insulation resistance:≥100MΩ/50VDC
Insulation voltage:500VAC between the housing and electrical connection will not cause damage
Medium compatible: liquid, gas compatible with 316L stainless steel

 
Performance Specification

 

Parameters

Range0~10KPa20KPa 35 KPa70 KPa100 KPa200 KPa350 KPa 700 KPa 1MPa 2MPa3.5 MPa7 MPa10 MPa

20 MPa35 MPa60 MPa70 MPa80 MPa90 MPa100 MPa

 

 

 

700Kpa1000Kpa2000Kpa

Typical

Max.

Units

Pressure Non-linearity

±0.15 (0~2MPa)

±0.2 (3.5MPa ~100MPa)

 

±0.3

%F.S

Pressure Repeatability and Hysteresis

0.02

0.05

%F.S

Zero Output

0±1

0±2

mV

Span Output

20KPa

50±10

50±30

mV

35 KPa

100±10

100±30

mV

Temperature Error-Zero

20KPa

±1

±2

%F.S

35 KPa

±0.5

±1

%F.S

Temperature Error-Span

20KPa

±1

±2

%F.S

35 KPa

±0.5

±1

%F.S

Proof  Pressure

3X Rated range or 120MPa, whichever is less

-------

Operating Temperature  Range

-20~80

Compensated  TemperatureRange

0~70,   0~50(Range20KPa)

Storage Temperature  Range

-40~125

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 










Note :Above parameter under condition:Supply: 1.5mA   Temperature: 25℃







  


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