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Microsensors referred to in "Microsensors" refer to those sensors that have at least one physical dimension on the order of sub-millimeters. The book is divided into 10 chapters: Introduction, Microsensors and Signals, Common Materials and Processing Technology of Microsensors, Thermal Microsensors, Radiation Microsensors, Mechanical Microsensors, Magnetic Microsensors, Common Methods of Chemical Microsensors, Chemical Amounts Data acquisition of microsensors and microsensors.
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